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Unique chemical vapor deposition thin film compositions with useful properties



Technology:
Transparent conductor (formerly zinc oxyflouride)

Markets Addressed


This invention embodies unique chemical vapor deposition (CVD) thin film compositions that reflect infrared radiation, transmit visible light, absorb ultraviolet radiation and conduct electricity. Furthermore, these transparent conductors can easily be patterned. Materials with these properties may have applications in photovoltaic devices (for example, as electrodes for solar cells), computer screens, television screens, liquid crystal displays (LCDs), or as electrochromic absorbers or reflectors, and as anti-static coatings.

Innovations and Advantages


Speed and simplicity are two outstanding merits of this new process. Compared with other methods, the rate of deposition of the layer is relatively fast (>1300 Å/min-1). Deposition occurs at atmospheric pressure using a simple belt furnace. An additional advantage of this method is that it is designed to use inexpensive materials (such as, zinc, oxygen, and fluorine).

Additional Information




Inventor(s):
    Gordon, Roy G.

Categories:
For further information, please contact:
Mick Sawka, Director of Business Development
(617) 496-3830
Reference Harvard Case #0555